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inductively coupled plasma reactive ion etching tool si 500  (SENTECH CO LTD)

 
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    SENTECH CO LTD inductively coupled plasma reactive ion etching tool si 500
    Inductively Coupled Plasma Reactive Ion Etching Tool Si 500, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/si+500+etch+tool/icp+rie+si+500/pm37185516-93-42-45
    Average 90 stars, based on 1 article reviews
    inductively coupled plasma reactive ion etching tool si 500 - by Bioz Stars, 2026-10
    90/100 stars

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    Related Articles

    Polymer:

    Article Title: On the Fabrication and Characterization of Polymer-Based Waveguide Probes for Use in Future Optical Cochlear Implants.
    Article Snippet: .. Finally, the polymer layer stack of 2.5 μm top cladding PMMA, 200 nm adhesion layer SU-8 2000.5, 2.5 μm PMMA bottom cladding/supporting pedestal layer, 200 nm adhesion layer SU-8 2000.5 and the 5 μm PMMA substrate layer is patterned by lithography with the waveguide probe system, which is etched using the Ti hard mask in an O2 dry etching process at a Sentech SI 500 etch tool with 50 sccm O2, 60 W bias and 300 W ICP down to the SiO2. ..



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